ECR line beam ion source "ELBS-150"
Beam energy 100 to 2,000 eV! Uniform long ion beam with innovative magnetic circuit design.
The "ELBS-150" is a line beam ion source of the ECR (Electron Cyclotron Resonance) discharge type that can be applied to reactive ion beam milling equipment. It features high-power microwave drive with a newly developed large coaxial input terminal (7/16 type). It can be applied to milling of magnetic heads and trimming adjustments of high-frequency circuits. 【Features】 - Uniform long ion beam due to innovative magnetic circuit design - High-power microwave drive with newly developed large coaxial input terminal (7/16 type) - Dielectric lining that is metal contamination-free - Newly developed long-life beam electrode *For more details, please refer to the PDF document or feel free to contact us.
- Company：ノベリオンシステムズ
- Price：Other
